TGS1_PTB

Grating set TGS1 (consists of three gratings TGZ1, TGZ2, TGZ3) can be ordered with PTB traceable certificate.
The gratings TGS1_PTB are measured on the AFM which has been preliminary calibrated using the PTB certified grating set TGS1.
Step height range: 20±2nm (TGZ1), 110±10nm (TGZ2),  520±20nm (TGZ3).
Step height accuracy: ±1,5nm (TGZ1), ±2nm (TGZ2),  520±5nm (TGZ3).
In comparision with TGS1 grating set you will have height meanings with lower uncertainties that will help to obtained more reliable scans of the scanned objects.